A Pzt Multilayer Thick-film Actuator for Ultrasonic Applications
نویسندگان
چکیده
In many MEMS applications there is a requirement for actuating a structure. This paper describes a method of generating acoustic power from a PZT based thick-film structure which gives output power and electrical efficiencies at least as good as, and in some cases better than bulk PZT in the same application.
منابع مشابه
Multilayer Actuator Composed of PZN–PZT and PZN–PZT/Ag Fabricated by Co-Extrusion Process
A multilayer ceramic actuator composed of piezoelectrically active Pb(Zn1/3Nb2/3)0.2–Pb(Zr0.5Ti0.5)O0.8 (PZN–PZT) layers and electrically conducting PZN–PZT/Ag layers was fabricated by the co-extrusion process. For the piezoelectric layers, PZN–PZT, which is sinterable at a low temperature (9001C), was used. For the conducting layers, a PZN–PZT/Ag composite, made by mixing silver particles with...
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